The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2003
Filed:
Mar. 13, 2001
Applicant:
Inventor:
Tetsuya Taguwa, Tokyo, JP;
Assignee:
NEC Electronics Corporation, Kawasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05B 3/126 ;
U.S. Cl.
CPC ...
H05B 3/126 ;
Abstract
A processed object, i.e., a circuit-constituting member is positioned by a member-transferring unit at a given position in a member-waiting portion when plasma starts to be generated in a plasma-generative portion, and the circuit-constituting member is transferred from the member-waiting portion to the plasma-generative portion when the plasma started to be generated in the plasma-generative portion is brought into a stable condition thereof. Thus, the circuit-constituting member is not subjected to a circuit-processing by plasma before the stable condition is not reached but is surely subjected to the circuit-processing only by plasma in the stable condition.