The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2003
Filed:
Jul. 02, 2001
Applicant:
Inventors:
Michiyoshi Tanaka, Taihaku-ku, Sendai, 982-0801, JP;
Masami Terauchi, Sendai, JP;
Kenji Tsuda, Sendai, JP;
Katsushige Tsuno, Tokyo, JP;
Toshikazu Honda, Tokyo, JP;
Assignee:
Other;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/714 ;
U.S. Cl.
CPC ...
H01J 3/714 ;
Abstract
An omega energy filter capable of increasing energy dispersion while canceling out second-order aberrations. The energy filter is mirror-symmetric with respect to the center plane C. A beam enters a first nonuniform magnetic field produced by a first magnet, then enters a second nonuniform magnetic field region produced by a second magnet. The trajectory of the beam is curved by the field produced by the second magnet. Finally, the beam enters a third magnetic field region produced by the first magnet. The beam is deflected in this region and reaches an exit slit.