The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6624065 B1

PDF
Full Text
Expired
Date of Patent:
Sep. 23, 2003

Filed:

Oct. 12, 2001
Applicant:
Inventors:

Se Aug Jang, Kyoungki-do, KR;

Woo Seock Cheong, Kyoungki-do, KR;

Assignee:

Hynix Semiconductor Inc., Kyoungki-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/14163 ;
U.S. Cl.
CPC ...
H01L 2/14163 ;
Abstract

A method of fabricating a semiconductor device using a damascene metal gate including the steps of forming a damascene gate oxide layer and a damascene gate electrode on a semiconductor substrate, forming a trench at an upper part of the damascene gate electrode by selectively etching a portion of the damascene gate electrode to a predetermined thickness, forming an insulating layer in the trench on the damascene gate electrode, forming an insulating interlayer on an upper surface of the entire structure, and forming a contact hole exposing a portion of the semiconductor substrate by selectively etching the insulating interlayer.


Find Patent Forward Citations

Jang, Se. (2003). Method of fabricating a semiconductor device using a damascene metal gate (U.S. Patent No. 6624065). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6624065

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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