The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2003
Filed:
Aug. 07, 2001
Applicant:
Inventors:
Serban Cantacuzene, Massy, FR;
Thierry Sindzingre, Cachan, FR;
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/640 ; C23C 1/6509 ;
U.S. Cl.
CPC ...
C23C 1/640 ; C23C 1/6509 ;
Abstract
A method and installation for forming a coating on a substrate, wherein the substrate is contacted with a gas treatment atmosphere in order to carry out said coating. The gas treatment atmosphere includes a primary gas treatment mixture comprising excited or unstable gaseous species obtained from a device which converts an initial gas mixture into said species, and an adjacent gas treatment mixture comprising at least one gas precursor required to form said coating, whereby the adjacent mixture is not transported via said device. The adjacent gas treatment mixture is injected into the flow of the primary gas mixture when the gas exits from the device.