The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2003
Filed:
Jun. 12, 2001
Ynh-Sheng Lin, Hsinchu, TW;
Yu-Hsi Chao, Chang-Hua, TW;
Cheng-Tang Pan, Tainan Hsien, TW;
Kun-Lung Lin, Chang-Hua Hsien, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
The present invention provides a fabrication process for making an integrated micro spherical lens for an optical switch. Through a semiconductor micro imaging process and a wet-etching process of micro electromechanical working, a plurality of V-shape grooves and mesas are formed on the surface of a base. A further micro imaging process, an etching process and a heat tempering process are used to form a micro spherical lens on the mesa, so that an integrated micro spherical lens and fiber array can be precisely arranged.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile