The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2003
Filed:
Mar. 24, 2000
NewCreation Co., Ltd., Tokyo, JP;
Abstract
A surface examining method and a surface examining apparatus, in which a large-sized lens of an object-side telecentric optical system is not required and which can observe a surface to be examined in a wide region. A surface examining method for examining a surface of an object to be measured, by observing a light reflected from the object through an object-side telecentric optical system or an image-object-side telecentric optical system, comprises the steps of; arranging the object-side telecentric optical system or the image-object-side telecentric optical system so that an optical axis thereof is inclined with respect to a direction normal to the object to be measured, and observing the light reflected from the object to be measured.