The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2003
Filed:
Jan. 10, 2001
Timothy J. Moran, San Jose, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
The improved process according to the invention prepares samples for subsequent imaging by directing the FIB beam so that its incident angle is not parallel to the planar boundaries between the materials with different etch rates. This nonparallel alignment has the effect of evening out the etch rate, since most of the key beamlets cut more than one type of material. SEM images of the resulting samples are easier to interpret than those produced by the prior art since the obscuring effect of curtaining is reduced. This allows greater accuracy of measurement from the image obtained by an SEM. A method according to a preferred embodiment of the invention is used to prepare a pole piece tip of a magnetic transducer so that the bottom width may be more accurately measured.