The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2003
Filed:
Jan. 17, 2002
Applicant:
Inventors:
A. David Johnson, San Leandro, CA (US);
Valery Martynov, San Francisco, CA (US);
Assignee:
TiNi Alloy Company, San Leandro, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 3/126 ; H01L 2/166 ;
U.S. Cl.
CPC ...
H01L 3/126 ; H01L 2/166 ;
Abstract
A method of measuring with high accuracy the composition of shape memory alloy elements that are sputter deposited in thin film form. An element of known composition is polished with a flat surface. An element of unknown composition is sputter deposited onto the surface. Miniature openings are made by photography in the unknown layer, exposing an area of the known substrate. With adjacent areas of the two samples then only microns apart, accurate measurements of the compositions are made by comparing the X-ray spectra resulting from an electron beam scanning across the two areas.