The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2003
Filed:
Mar. 14, 2000
Applicant:
Inventor:
Yumiko Ohsaki, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 9/00 ; G03C 5/00 ;
U.S. Cl.
CPC ...
G03F 9/00 ; G03C 5/00 ;
Abstract
A mask for multiple exposure includes a plurality of periodic patterns in which a relation 0.5S<D<1.5S is satisfied, where S is the spacing between lines of a first periodic pattern of the plurality of periodic patterns and D is the spacing between the first periodic pattern and a second periodic pattern, of the plurality of periodic patterns, juxtaposed to the first periodic pattern with respect to the periodicity direction. The first periodic pattern and the second periodic pattern are free from overlapping or intersecting with each other.