The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2003
Filed:
Nov. 09, 2001
Applicant:
Inventors:
Thomas B. Brezoczky, San Jose, CA (US);
Randy Schmieding, Saratoga, CA (US);
Gene Y. Kohara, Fremont, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/600 ; B01D 8/00 ;
U.S. Cl.
CPC ...
C23C 1/600 ; B01D 8/00 ;
Abstract
A method and apparatus for shielding a device, such as a pump, from a process chamber of a semiconductor wafer processing system. The apparatus comprises a shield connected to a mounting portion. The mounting portion has a fluid passage wherein the temperature of the apparatus is regulated by flowing fluid through the passage.
Brezoczky, Thomas. (2003). Method and apparatus for shielding a device from a semiconductor wafer process chamber (U.S. Patent No. 6620250). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6620250
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile