The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2003
Filed:
Nov. 01, 2001
Applicant:
Inventor:
Catherine Grezes-Besset, Marseilles, FR;
Assignee:
Highwave Optical Technologies, Marseilles, US;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C 1/100 ; C23C 1/652 ;
U.S. Cl.
CPC ...
B05C 1/100 ; C23C 1/652 ;
Abstract
The present invention relates to a method and to apparatus for depositing thin layers. The technical field of the invention is that of manufacturing thin layer optical devices. In the invention, apparatus for depositing thin layers on a plurality of substrates comprises means for producing a light beam for monitoring the optical thicknesses of the substrates.