The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2003
Filed:
Mar. 14, 2002
Urs Wälchli, Heiliqkreuz, CH;
Per Björkman, Palsböle, FI;
Rudolf Stocker, Azmoos, CH;
Marcel Gantner, Weite, CH;
Unaxis Balzers AG, Balzers, LI;
Abstract
A pressure sensor has a baseplate and a support plate with a membrane. Layers on the membrane and the support plate are connected to a circuit for capacitively measuring pressure to generate a first pressure signal. A thermal conductivity measuring element that generates a second pressure signal has a heating element connected to the baseplate adjacent the support plate at a location opposite from the membrane for protecting the membrane from thermal effects. The method uses the sensor apparatus to generate an output signal representing a measured result when the measured result is above a transition value, on the basis of the first pressure signal and, when the pressure falls below a threshold value, any offset of the first pressure signal is compensated in such a way that determination of the output signal on the basis of the first pressure signal leads to the same result as determination of the output signal on the basis of the second pressure signal.