The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2003
Filed:
Sep. 24, 1998
Jong-hoon Lee, Yongin, KR;
Yu-kwang Shin, Yongin, KR;
Young-nam Ko, Yongin, KR;
Jae-gyu Kim, Yongin, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
A semiconductor probe station including a cooling system and method thereof is provided. The probe station is used for Electrical Die Sorting (EDS) of semiconductor device. The probe station cooling system includes an air source for supplying pressurized air, an air supplier having a plurality of nozzles, and an air supply line coupled at a first end to the air source and at a second end to the air supplier for transferring the pressurized air from the air source to the air supplier. The plurality of air openings are provided on one end of each of the plurality of nozzles. The plurality of nozzles are aligned along a first direction. The air supplier includes a first and a second end nozzles having an angled air exit such that the pressurized air is centrally directed.