The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2003
Filed:
Mar. 13, 2001
Applicant:
Inventors:
Ernst H. Dummermuth, Chesterland, OH (US);
Richard D. Harris, Solon, OH (US);
Michael J. Knieser, Richmond Heights, OH (US);
Assignee:
Rockwell Automation Technologies, Inc., Mayfield Heights, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 1/00 ;
U.S. Cl.
CPC ...
H02N 1/00 ;
Abstract
Microelectricalmechanical systems (MEMS) manufactured on a microscopic scale using integrated circuit techniques may be used to measure a variety of parameters using electrical signals generated by the movement of small beams. Inertial noise may be canceled by the duplication of the beam structure for sensing of the acceleration to be subtracted from a similar beam structure used to measure the parameter of interest.