The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 09, 2003

Filed:

May. 19, 2000
Applicant:
Inventors:

Norikatsu Koide, Nara-ken, JP;

Hisaki Kato, Aichi-ken, JP;

Assignee:

Toyoda Gosei Co., Ltd., Nishikasugai-gun, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/920 ; H01L 3/10304 ;
U.S. Cl.
CPC ...
H01L 2/920 ; H01L 3/10304 ;
Abstract

A layer comprising silicon oxide (SiO ) is formed on (111) plane of a silicon (Si) substrate in a striped pattern which is longer in the [1-10] axis direction perpendicular to the [110] axis direction. Then a group III nitride compound semiconductor represented by a general formula Al Ga In N (0≦x≦1, 0≦y≦1, 0≦x+y≦1) is laminated thereon. The group III nitride compound semiconductor represented by a general formula Al Ga In N (0≦x≦1, 0≦y≦1, 0≦x+y≦1) grows epitaxially on the substrate-exposed regions B which are not covered by the SiO layer, and grows epitaxially on the SiO layer in lateral direction from the regions B. Consequently, a group III nitride compound semiconductor having no dislocations can be obtained.


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