The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2003
Filed:
Mar. 05, 2001
Hideomi Koinuma, Yokohama, JP;
Masashi Kawasaki, Yokohama, JP;
Japan Science and Technology Kawaguchi, Tokyo, JP;
Abstract
A laser heating apparatus ( ) for heating a thin film forming substrate ( ) in a thin film manufacturing process is disclosed. The substrate ( ) set in position in a vacuum chamber ( ) of a film forming apparatus ( ) is irradiated with a laser light and is thereby heated to a desired temperature. The laser light is guided to a region of the substrate ( ) by means of an optical fiber ( ), and the laser beams emanating from the outlet end of the optical fiber ( ) is incident directly or indirectly via a reflecting mirror ( ) on the substrate ( ). The optical fiber ( ) is sheathed with a jacket tube ( ) whose interior is vacuum drawn. Using a laser light enables the arrangement to be used even in an oxidizing atmosphere and even an insulating substrate to be heated.