The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2003
Filed:
Sep. 09, 2002
Applicant:
Inventors:
Ming-Chun Hsiao, Hsinchu, TW;
Kai-Nung Su, Taipei, TW;
Cheng-Chung Lee, Hsinchu, TW;
Pang Lin, Hsinchu, TW;
San-Yuan Chen, Hsinchu, TW;
Assignee:
Industrial Technology Research Institute, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/131 ; H01L 2/1469 ;
U.S. Cl.
CPC ...
H01L 2/131 ; H01L 2/1469 ;
Abstract
Disclosed herein is an SOG (Spin on Glass) material for spacer anodic bonding, which includes: 0.1˜3 wt % of tetraethyl orthosilicate (TEOS); 0.1˜5 wt % of methyl triethyl orthosilicate (MTEOS); 20˜30 wt % of ethanol; 0.1˜2 wt % of acetic acid solution containing alkali metal ions; and 0.1˜10 wt % of water. The solid content of alkali metal elements in the acetic acid solution containing alkali metal ions is 5%˜60%, and the pH value of the SOG material is 4˜6.