Etching mask, process for forming contact holes using same, and semiconductor device made by the process

Abstract

An etching mask having high etching selectivity for an inorganic interlayer film of SiO or Si N , an organic interlayer film such as ARC and an electrically conductive film and a contact hole using such an etching mask, a process for forming same and a resultant semiconductor device. On formation of contact holes for connecting wirings disposed through interlayer films of inorganic or organic material ( in FIG. ), a thin film of silicon carbide ( in FIG. ) having high etching selectivity for any of the inorganic and organic materials is deposited on an interlayer film, and a mask pattern of silicon carbide is formed using a resist pattern ( in FIG. ). Thereafter, high aspect ratio contact holes having a size which is exactly same as that of the mask is formed by etching the interlayer film using the silicon carbide mask.