The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2003
Filed:
May. 04, 2001
Israel Rotstein, Migdal Haemek, IL;
Tower Semiconductor Ltd., Migdal Haemek, IL;
Abstract
A fieldless CMOS image sensor that include a non-LOCOS isolation structure surrounding the photodiode diffusion region of each pixel. The isolation structure is formed by an anti-punchthrough (APT) implant isolation region formed in the substrate around the photodiode diffusion region, and spacer oxide that is formed using a special mask to cover the APT implant region. The APT implant isolation region is self-aligned with the special spacer oxide mask. A width of the isolation structure between two adjacent photodiodes is 0.5 &mgr;m or more. Similarly, LOCOS structures that are used, for example, in the image sensor active circuitry, are separated from the image-sensing (e.g., photodiode) region of each pixel by portions of the isolation structure having a width of 0.5 &mgr;m or more.