The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2003
Filed:
Feb. 24, 1999
Yoshihide Senzaki, Carlsbad, CA (US);
Arthur Kenneth Hochberg, Solana Beach, CA (US);
Kirk Scott Cuthill, Vista, CA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
A method for producing a material selected from the group consisting of metal oxide, metal oxynitride and mixtures thereof on a substrate, comprising; reacting a first reactant selected from the group consisting of (R R N) M(═NR ) , (R R N) M[&eegr; —R N═C (R )(R )] and mixtures thereof with an oxidant and up to 95 volume percent of a source of nitrogen selected from the group consisting of ammonia, N O, NO, NO , alkyl amines, N H , alkyl hydrazine, N and mixtures thereof, to produce said material on said substrate, where R , R , R , R , R , R , R and R are individually C alkyl, aryl or hydrogen, M═Ta, Nb, W or Mo or mixtures thereof, and when M═Ta or Nb, x=3 and y=1 and when M═W or Mo, y=x=2.