The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2003
Filed:
Oct. 31, 2001
Toru Oshima, Kasugai, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A workpiece to be processed is placed and fixed to an X-Y stage capable of translation motion along X-and Y-axis directions orthogonal to each other. The X-Y stage is moved to a first position. The X-Y stage is approach-run in the X-axis direction and in a negative Y-axis direction and stopped at a second position. The workpiece is processed while the X-Y stage stops at the second position. The process of moving the X-Y stage in the negative Y-axis direction by some distance and processing the workpiece while the X-Y stage stops, is repetitively executed. Even if the regularity of motion of the X-Y stage is disturbed, it is possible to suppress a lowered stage position accuracy.