The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2003
Filed:
Sep. 05, 2001
Bernd Klehn, München, DE;
Juergen Lindolf, Friedberg, DE;
Infineon Technologies AG, Munich, DE;
Abstract
A measurement probe for detecting electrical signals in an integrated circuit on a semiconductor chip has a lever arm and a probe tip which is configured on the lever arm. The lever arm is made of a highly conductive material that is covered by an extremely thin insulator layer. The probe tip has a window in the insulator layer at the apex point, and the lever arm makes contact through the insulator layer. This measurement probe can be operated in a force mode and in a tunneling mode, in order to move to a measurement point on the integrated circuit with high positioning accuracy, and to detect the electrical signals at this measurement point.