The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2003
Filed:
Dec. 21, 2000
Salvatore Leonardi, Aci S. Antonio, IT;
Roberto Modica, Catania, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
A vertical capacitor structure fabricated in a semiconductor substrate region overlaid by a buried oxide layer and a buried doped layer, as well as by a semiconductor layer that includes a sinker doped region in contact with the buried doped layer, wherein an oxide trench structure is formed, this oxide trench structure being filled with suitably doped polysilicon to produce, in combination with the sinker region, the plates of the vertical capacitor structure, with the oxide trench structure forming the dielectric therebetween. A process for integrating a vertical capacitor structure starting from a structure blank that includes a semiconductor substrate, a buried oxide layer and a buried doped layer is also provided.