The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2003
Filed:
Jan. 26, 2001
Applicant:
Inventor:
Michael James Lercel, Williston, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 9/00 ; G03C 5/00 ; G06F 1/750 ; G21K 5/00 ;
U.S. Cl.
CPC ...
G03F 9/00 ; G03C 5/00 ; G06F 1/750 ; G21K 5/00 ;
Abstract
A mask includes an in-situ information storage mechanism on the mask, which stores mask pattern data that is supplied to a microlithographic tool (e.g., an optical stepper). The advantages of using the invention include immediate availability of pattern data of a particular mask to the microlithographic tool for improved integrated circuit productivity.