The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 19, 2003

Filed:

Sep. 09, 2002
Applicant:
Inventors:

Morito Akiyama, Tosu, JP;

Naohiro Ueno, Saga-ken, JP;

Kiichi Ikeda, Oita, JP;

Kazuhiro Nonaka, Tosu, JP;

Hiroshi Tateyama, Tosu, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 4/104 ; H01L 4/108 ; H01L 4/118 ; H02N 2/00 ;
U.S. Cl.
CPC ...
H01L 4/104 ; H01L 4/108 ; H01L 4/118 ; H02N 2/00 ;
Abstract

Disclosed is a high-sensitivity flexible ceramic sensor for detecting mechanical shocks and vibrations, which comprises a metal foil of a specified thickness as a substrate, a single-crystalline thin film of a piezoelectric ceramic material such as aluminum nitride and zinc oxide having a specified thickness formed on the substrate, a metallic electrode formed on the thin ceramic film and an external circuit connecting the metal foil and the electrode with insertion of an electric meter for measuring the piezoelectric voltage changes induced in the ceramic thin film.


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