The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2003
Filed:
Apr. 02, 2001
Applicant:
Inventors:
Yasuo Tarui, Tokyo, JP;
Kazuo Sakamaki, Tokyo, JP;
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/976 ;
U.S. Cl.
CPC ...
H01L 2/976 ;
Abstract
Ferroelectric memory element having an MFIS structure including a silicon semiconductor substrate and an insulating film arranged above the silicon semiconductor substrate. The insulating film includes a low dielectric constant layer restraining film and a mutual diffusion preventive film so that an unnecessary, low dielectric constant layer is prevented from forming between the semiconductor substrate and the insulating film. A ferroelectric film is arranged on the insulating film. The low dielectric constant layer restraining film is thinner than the ferroelectric film.