The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2003
Filed:
May. 26, 2000
Applicant:
Inventors:
Toru Takagi, Yokohama, JP;
Hiroshi Nishimura, Kawasaki, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K 7/00 ; G03C 5/00 ;
U.S. Cl.
CPC ...
G21K 7/00 ; G03C 5/00 ;
Abstract
Electron-optical systems are disclosed that are especially useful in mapping-projection electron microscopy and related uses. The systems achieve high magnification with excellent control of aberrations, and low magnification at wide optical fields with excellent control of aberrations.