The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2003
Filed:
Jun. 27, 2002
Christof Baur, Dallas, TX (US);
Zyvex Corporation, Richardson, TX (US);
Abstract
A system and method provide three-dimensional real time stabilization of the gap between probe tip and sample in a scanning probe microscope (SPM) against creep and drift. Supplemental signals in each axis provide supplemental movement to the probe tip to offset drift. The supplemental signals can be applied simultaneously or sequentially in any combination of axes. Typically the supplemental signals are determined from calculated drift predictions, based on drift measurements inferred from feedback in response to the gap-dependent strength of an interaction between probe and sample. Waveform modulation is coupled into the drive circuitry for each axis, and a waveform-synchronous feedback signal is extracted and processed to measure drift. The waveform modulations can be identical or asynchronous and applied sequentially or simultaneously in any combination of axes. An algorithm performs the process in real time.