The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 12, 2003

Filed:

Feb. 14, 2002
Applicant:
Inventors:

Robert Lutwak, Marblehead, MA (US);

William J. Riley, Jr., Hamilton, MA (US);

Kenneth D. Lyon, Wilmington, MA (US);

Assignee:

Symmetricom, Inc., Beverly, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/984 ; H01L 2/986 ;
U.S. Cl.
CPC ...
H01L 2/984 ; H01L 2/986 ;
Abstract

The present invention provides an analog frequency divider structure that receives an input signal at a selected frequency and generates an output signal at a fraction, e.g. one-half, of the input frequency. In one embodiment, the analog frequency divider structure is implemented as a MEMS device having a vibratory beam extending along a longitudinal axis between two fixed ends and a piezoelectric transducer coupled to the beam. The MEMS structure further includes a conductive layer disposed on at least a portion of the vibratory beam, which is capacitively coupled to a conductive electrode. A longitudinal excitation of the piezoelectric transducer can effect application of a periodic longitudinal deformation force to the vibratory beam. This deformation force causes the beam to vibrate in a transverse direction at its natural transverse vibrational frequency, which is selected to be a fraction of the input frequency. The conductive electrode capacitively couples to this transverse vibration to generate an output electrical signal at the transverse vibrational frequency.


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