The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 12, 2003

Filed:

Sep. 05, 2000
Applicant:
Inventors:

Maximilian Haider, D-69251 Gaiberg, DE;

Stephan Uhlemann, D-69126 Heidelberg, DE;

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/710 ;
U.S. Cl.
CPC ...
H01J 3/710 ;
Abstract

A device for correcting third-order spherical aberration in the objective lens of an electron microscope, including an objective lens and a correction device which is formed by two hexapoles and a round-lens doublet arranged therebetween having two round lenses with the same focal length, whereby a single round lens ( ) is arranged between the objective lens ( ) and the correction device ( ) in such a way that a parallel optical path hits the correction device ( ) and the coma-free plane ( ) of the objective lens is represented on the plane of the first hexapole ( ) of the correction device ( ) or two round lenses with different focal lengths are arranged between the objective lens and the correction device, whereby the distance between the round lens ( ) close to the objective and the coma-free plane ( ) of the objective and the distance between the round lens ( ) close to the correction device and the coma-free plane ( ) of the correction device is the same is terms of focal length and the distance between both round lenses ( ) is equal to the sum of their focal lengths.


Find Patent Forward Citations

Loading…