The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2003
Filed:
Oct. 25, 1999
Applicant:
Inventors:
Ayako Yoshida, Tsurugashima, JP;
Atsushi Onoe, Tsurugashima, JP;
Kiyofumi Chikuma, Tsurugashima, JP;
Assignee:
Pioneer Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B 3/300 ; C30B 3/308 ; C30B 3/312 ; H01L 2/13065 ;
U.S. Cl.
CPC ...
C30B 3/300 ; C30B 3/308 ; C30B 3/312 ; H01L 2/13065 ;
Abstract
A method of manufacturing a ridge-shaped 3-dimensional waveguide, has the steps of: forming a crystal film made of a second ferroelectric oxide non-linear crystal having a refractive index higher than that of a substrate made of a first ferroelectric oxide non-linear crystal on the substrate; forming a metal film on the crystal film; forming a mask by etching the metal film; and forming a ridge portion by selectively removing the crystal film through the mask by a dry etching method.