Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamber

Abstract

A method is disclosed for manufacturing parts with intimate connection of least two material phases, of which at least one is a solid body phase. Prior to intimate connection, at least the surface of the solid body phase to be connected is pretreated by a plasma-activated gas that contains nitrogen. The method is used, for example, for connecting integrated circuits with an HLST or for the electrical connection of the printed circuits by wire bonding or for the sheathing of electrical circuits joined with HLST and connected by wire bonding, with a potting compound. A workpiece stored in air is characterized by a surface exposed to the air, by contrast with a surface of the workpiece produced directly, having an elevated nitrogen concentration, detectable for example by a “Fourier transform infrared spectroscopy” with “attenuated total reflection” FTIR-ATR and/or with “nuclear reaction analysis,” NRA and/or with “time of flight secondary ion mass spectrometry,” TO-SIMS. Also disclosed is a vacuum processing chamber with a plasma discharge section, a gas supply to the chamber, connected with a gas tank arrangement, as well as with a workpiece holding device. The gas tank arrangement contains a gas with nitrogen and the holding arrangement has at least one access slit open to the discharge chamber for a disk-shaped or plate-shaped workpiece.