The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2003
Filed:
Oct. 21, 2000
Yutaka Ono, Tokyo, JP;
Shigeru Hashida, Tokyo, JP;
Yutaka Koizumi, Tokyo, JP;
Fumio Kaiho, Tokyo, JP;
Yasuhito Kosugi, Tokyo, JP;
Ryuichi Jimbo, Tokyo, JP;
Atsufumi Kimura, Tokyo, JP;
Yokogawa Electric Corporation, Tokyo, JP;
Abstract
A two-dimensional positioning apparatus for positioning an object in a two dimensional direction, wherein are provided a platen, a slider having two X-axis motors and sensors and a Y-axis motor and sensor disposed above the platen, a converter for providing signals to detect the X-axis position of the center point of the slider, a controller for feedback control of the slider in a X-axis direction and a yaw direction, and for feedback control in the Y-direction, and a converter circuit for converting output of the controller to propulsion commands to be supplied to the motors, wherein a limiter is provided to restrict one axis limits of the propulsion commands. In this manner, accuracy is improved and flexibility is increased.