The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2003
Filed:
Nov. 16, 2000
Mike Binnard, Belmont, CA (US);
Nikon Corporation, , JP;
Abstract
A stage assembly ( ) for moving and positioning a device ( ) is provided herein. The stage assembly ( ) includes a stage base ( ), a stage ( ), a stage mover assembly ( ), and a reaction assembly ( ). The stage mover assembly ( ) moves the stage ( ) along an X axis and along a Y axis relative to the stage base ( ). The reaction assembly ( ) is coupled to the stage mover assembly ( ). Uniquely, the reaction assembly ( ) reduces the reaction forces created by the stage mover assembly ( ) in three degrees of freedom that are transferred to the stage base ( ). As provided herein, the reaction assembly ( ) includes a first reaction mass ( ) and a second reaction mass ( ) that move independently along the X axis, along the Y axis and about a Z axis. With this design, stage mover assembly ( ) has less influence upon the position of the stage base ( ). These features allow for more accurate positioning of the device ( ) by the stage assembly ( ) and better performance of the stage assembly ( ).