The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2003
Filed:
Jan. 16, 2002
Applicant:
Inventor:
Kyoungja Woo, Seoul, KR;
Assignee:
Korea Institute of Science and Technology, Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 7/28 ; C23C 1/600 ;
U.S. Cl.
CPC ...
C07F 7/28 ; C23C 1/600 ;
Abstract
The invention comprises an organotitanium precursor formed from a &bgr;-ketoester and a titanium glycolate, and dimer precursors formed from a reaction of the above organotitanium precursor with alcohol, which are used as sources of titanium dioxide for metal-organic chemical vapor deposition (MOCVD).