The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2003
Filed:
Nov. 28, 2001
Applicant:
Inventor:
Takayuki Matsuyama, Hiratsuka, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/100 ; B44C 1/22 ;
U.S. Cl.
CPC ...
H01L 2/100 ; B44C 1/22 ;
Abstract
A high-speed operation of an electroabsorption modulator is intended. A p-InGaAs contact layer is formed not only in an optical modulation region MA but also in an optical coupling region CA, and an AlInAs oxide layer is disposed in p-InP cladding layers and in a mesa MS portion of the optical coupling region CA.