The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2003
Filed:
Nov. 29, 2001
Seung-Hoon Ahn, Yongin-si, KR;
Seok-Hee Park, Yongin-si, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
A conveying apparatus conveys articles used for manufacturing semiconductor devices. The conveying apparatus has a conveying rail section that includes a first rail providing a first conveying route, a second rail providing a second conveying route, and an intermediate rail structure interconnecting the first and second rails. Respective vehicles are fitted to the first and second rails so as to convey articles as supported atop the first rail or as suspended from the second rail, respectively. The conveying apparatus can be readily installed in the bay of an automatic manufacturing system, e.g., of a type for processing wafers having a diameter of 300 mm. In this case, the conveying route of the articles is unified, and space is saved, as well.