The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2003
Filed:
Jan. 03, 2002
Applicant:
Inventors:
Satoshi Machida, Tokyo, JP;
Akiyuki Minami, Tokyo, JP;
Assignee:
Oki Electric Industry Co, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 2/100 ;
U.S. Cl.
CPC ...
G01D 2/100 ;
Abstract
A method for manufacturing a highly reliable alignment mark in which by-products do not form at an aligning mark position during patterning. In this method, an intermediate layer is disposed on an upper layer of a first wiring to protect the first wiring. Then, a filling material is coated thereon to fill in a through hole. Thereafter, a plug is formed by etch-backing, and a second wiring is formed.