The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2003
Filed:
May. 23, 2001
Applicant:
Inventors:
Bernd Kleemann, Aalen, DE;
Klaus Heidemann, Oberkochen, DE;
Assignee:
Carl-Zeiss Stiftung, , DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 2/744 ;
U.S. Cl.
CPC ...
G02B 2/744 ;
Abstract
A diffraction grating ( ) has a multiplicity of parallel diffraction structures succeeding one another periodically. The latter are arranged on a support ( ) and each incorporate a slat ( ) extending from a base area ( ) of the support ( ). Said slat has a substantially rectangular cross-section. The width w of the slat ( ) comes to less than 100 nm, preferably between 20 nm and 60 nm, more preferably in the area of 50 nm. Advantageous uses of the diffraction grating ( ) are obtained e.g. in a Littrow configuration, preferably in third order of the incident light beams ( ), in particular at a light wavelength that is less than 250 nm.