The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2003
Filed:
Jan. 10, 2001
Paul M. Green, Morgan Hill, CA (US);
Bob C. Robinson, Hollister, CA (US);
Eric Christian O'Brien, Milpitas, CA (US);
Elmer Tyree York, San Jose, CA (US);
Hitachi Global Storage Technologies Netherlands, B.V., Amsterdam, NL;
Abstract
A method for detecting manufacturing marks on sputtered disks includes rotating the disk three hundred and sixty degrees. As the disk rotates, a sensor is used to detect a quantity of manufacturing marks formed on the outer edge of the disk. If there are less than four manufacturing marks on the edge of the disk, a signal is sent to a warning device to indicate that the disk is defective. The lack of a manufacturing mark is an indication that a gripper used to hold the disk within the sputtering chamber during the sputtering process is bent or otherwise misaligned. As such, a signal is also sent to the warning device to indicate that the grippers within the sputtering chamber must be inspected.