The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 29, 2003

Filed:

Apr. 06, 2001
Applicant:
Inventor:

Helmut Paul, Dachau, DE;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/14 ;
U.S. Cl.
CPC ...
H01J 3/14 ;
Abstract

A device for treating a substrate with laser radiation is described. The device has a rotating polygon mirror with N reflecting surfaces which are used to direct a laser beam via a system of converting focusing lenses, whereby the focal planes of the lenses are located on a surface of the substrate. Active reflecting surfaces direct the laser beam onto the converging lens system, and subsequently on the substrate, while inactive reflecting surfaces have a different inclination to the active reflecting surfaces in relation to the converging lens system. The laser beam from the surfaces is directed onto an absorber. The large number of inactive reflecting surface helps to reduce serial hole density. When the laser is switched on and off while the inactive reflecting surfaces are being scanned, further reduction of serial hole density can be achieved.


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