The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 22, 2003

Filed:

Oct. 08, 2002
Applicant:
Inventors:

Ryoichi Ida, Tokyo, JP;

Katsuya Sangu, Tokyo, JP;

Katsumi Momose, Tokyo, JP;

Wataru Nakagawa, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K 5/00 ;
U.S. Cl.
CPC ...
G21K 5/00 ;
Abstract

A marking apparatus for forming alignment marks, which improves the alignment accuracy of each layer in the production of multi-layered printed circuit boards. An X-ray generator irradiates X-rays at a standard mark in a core board of a board , and projects the image of the standard mark on a fluorescence screen . The image is captured by a visible light CCD camera , thereby the position of the standard mark is detected. Using the detected position of the standard mark as an alignment reference, the apparatus irradiates ultra-violet rays at dry film resist layers via mirrors and , and imprints the marks emerged on photo masks and on the dry film resist layers , respectively.


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