The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2003
Filed:
Nov. 27, 2001
Parvis Tayebati, Watertown, MA (US);
CoreTek, Inc., Wilmington, MA (US);
Abstract
An electrically tunable Fabry-Perot structure using a deformable multi-layer mirror construction wherein Ga Al As, where a<0.1, is used as the sacrificial layer which may be selectively removed using a citric acid enchant. The multi-layer mirrors consist of N and M period of quarter wavelength layers where N and M are integers, or integers plus ½. Further, the mirrors are made from alternating layers of Ga Al As, where x>0.96, and a material selected from the group consisting of either Ga Al As, where 0.7>Z>0, or Ga Al As/Ga Al As/Ga Al As, where 0.7>Z>0 and y>0.5. The Ga Al As is wet oxidized by exposing its edge to water in a nitrogen or helium atmosphere at a temperature of between about 360° C. and 450° C. so as to transform it to AlO . The resulting AlO layers abut the sacrificial layer and act as etch stops during the formation of a cantilever Fabry-Perot structure by etching of the sacrificial layer.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile