The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2003
Filed:
Feb. 01, 2000
Hyae-Ryoung Lee, Kyungki-do, KR;
Abstract
Metal-insulator-metal capacitors include a first capacitor electrode comprising a first metal extending on a substrate and a first electrically insulating layer comprising a first material extending on the first capacitor electrode. The first electrically insulating layer has a first opening therein that exposes a first portion of the first capacitor electrode. An electrically insulating etch-stop layer that comprises a second material different from the first material, extends on the first electrically insulating layer and has a second opening therein. A capacitor dielectric layer extends on the exposed first portion of the first capacitor electrode and on sidewalls of the first electrically insulating layer and the etch-stop layer. A second capacitor electrode that comprises a second metal extends on the capacitor dielectric layer and opposite the first capacitor electrode. The first and second metals may both comprise copper, gold or aluminum. The second capacitor electrode may also comprise a composite of a tungsten plug and another metal layer on the tungsten plug.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile