The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2003
Filed:
Dec. 28, 2000
Jung-Min Ha, Seoul, KR;
Jung-Woo Park, Seoul, KR;
Abstract
A method of forming polycrystalline silicon germanium gate electrode is disclosed. The method include the steps of forming gate insulation layer on a substrate, forming a polycrystalline silicon layer on the gate insulation layer and making a plasma doping of germanium to the polycrystalline silicon layer. Generally, boron is doped to the polycrystalline silicon after the step of the plasma doping of germanium. The process of plasma doping of germanium comprises the step of forming germanium contained plasma and enhancing bias electric potential to substrate for the formulated germanium plasma to be accelerated and injected to the polycrystalline silicon layer revealed. If the present invention is applied to CMOS transistor device, doping mask for the germanium plasma doping can be used.