The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2003
Filed:
Oct. 08, 1999
Applicant:
Inventors:
Pawitter Jit Singh Mangat, Gilbert, AZ (US);
James Richard Wasson, Chandler, AZ (US);
Scott Daniel Hector, Oakland, CA (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C 5/00 ; G03F 9/00 ;
U.S. Cl.
CPC ...
G03C 5/00 ; G03F 9/00 ;
Abstract
A method of manufacturing a semiconductor component includes providing a semiconductor substrate ( ) with a photoresist layer and providing a reflective lithographic mask ( ) having a radiation-absorptive composite layer ( ) in a pattern over a radiation-reflective composite layer ( ). A radiation sensitive layer is disposed over the semiconductor substrate, and an extreme ultra-violet light ( ) reflects a pattern off of the mask and onto the photoresist layer.