The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2003
Filed:
Jan. 03, 2001
Applicant:
Inventors:
Wataru Shinohara, Katano, JP;
Yasuaki Yamamoto, Nara, JP;
Assignee:
Sanyo Electric Co., Ltd., Osaka, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/915 ;
U.S. Cl.
CPC ...
H01L 2/915 ;
Abstract
This invention provides a patterning method for a transparent electrode capable of preventing heat damages and insulation failure or the like even when a ZnO film is used. An ITO film is formed on a transparent substrate by sputtering and the ZnO film is formed on the ITO film by sputtering. Then, regions to be irradiated of the ITO film and the ZnO film are eliminated and patterned by Nd-YAG laser irradiation.