The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2003
Filed:
Sep. 18, 2001
Mizuki Segawa, Osaka, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
Gate insulating film, gate electrode made up of lower and upper gate electrodes, and on-gate passivation film are formed in this order on an Si substrate. Then, a sidewall is formed as a stack of an oxynitride sidewall having an L-shaped cross section and a nitride sidewall, so as to surround the gate electrode and on-gate passivation film. Alternatively, only the lower edge of an L-oxide sidewall may be changed into an oxynitride region. Or an oxide or stacked sidewall and a nitride sidewall, covering the oxide or stacked sidewall, may be formed instead of the oxynitride sidewall. In any of these embodiments, the lower edge of the sidewall is not removed during a wet etching process.