The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2003
Filed:
Dec. 20, 2001
Applicant:
Inventors:
Assignee:
The Furukawa Electric Co., Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/166 ;
U.S. Cl.
CPC ...
H01L 2/166 ;
Abstract
A condenser angle of 0.5 mrad or below is set with respect to a specimen. Electron-beam diameter of 20 to 100 nm &phgr; is set onto the surface of the specimen. A flux of highly parallel electron beams is irradiated onto the specimen having a strained layer quantum well structure. An image of electrons diffracted from the specimen is recorded onto an imaging plate. The recorded image is analyzed. Lattice constants and strains of layers of the strained layer quantum well structure are measured based on a result of this analysis.