The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2003
Filed:
Feb. 28, 2001
Applicant:
Inventors:
Oz Cabiri, Macabim, IL;
Hai Benron, Haifa, IL;
Assignee:
Creo IL. Ltd., Herzlia Pituach, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 ;
U.S. Cl.
CPC ...
G03F 7/20 ;
Abstract
A method and apparatus for printing a pattern on a substrate, by applying a photoresist layer over the substrate; locating a laser direct-imagining exposure head to print the pattern on the substrate by the application of one or more laser beams to the photoresist layer on the substrate while relative movement is effected between the exposure head and the substrate; and controlling the drive and the exposure head to cause the exposure head to print a first portion of the pattern on a first portion of the substrate at a first (normal) resolution, and a second portion of the pattern on a second portion of the substrate at a second (higher) resolution.